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PV03500 - SEMI PV35 - Specification for Horizontal Communication Between Equipment for Photovoltaic Fabrication System StdTpc-Gases - Specialty 1-0703 (Reapproved 1109)
PV03500 - SEMI PV35 - Specification for Horizontal Communication Between Equipment for Photovoltaic Fabrication System StdTpc-Gases - Specialty 1-0703 (Reapproved 1109)
$193.00
Description
1-0703 (Reapproved 1109)
SEMI D20-93E (editorial revision)
and unambiguously
SEMI S2-0703aE (editorial revision)
top semiconductor IDMs
PV03500 - SEMI PV35 - Specification for Horizontal Communication Between Equipment for Photovoltaic Fabrication System StdTpc-Gases - Specialty 1-0703 (Reapproved 1109)NOTICE: This Document is no longer supported by the global technical committee. It has been replaced by SEMI A1. The purpose of this Standard is to provide a specification for communication between adjacent equipment in material flow (hereinafter referred to as horizontal communication [HC]) to be used for photovoltaic fabrication system or similar ones (equipment here includes process equipment, metrology equipment, transport equipment and clustered
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