P02000 - SEMI P20 - Guideline for Catalog Publication of EB Resist Parameters (Proposal) StdTpc-Leadframes Standardization of these component interfaces

Standardization of these component interfaces will allow for interchangeability of gas distribution system components

SEMI C30-0301 (technical revision)

It has been replaced by SEMI F119

regardless of design or development date

This Specification is for general usage and outlines the basic requirements for open cassettes for 150 mm sapphire wafer sizes

P02000 - SEMI P20 - Guideline for Catalog Publication of EB Resist Parameters (Proposal) StdTpc-Leadframes Standardization of these component interfacesThis guideline was technically approved by the Global Micropatterning Committee and is the direct responsibility of the Japanese Micropatterning Committee. Current edition approved by the Japanese Regional Standards Committee on April 28, 2003. Initially available at www. semi. org June 2003; to be published July 2003. Originally published in 1992. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain