S00600 - SEMI S6 - 半導体製造装置の排気換気に関する環境，健康，安全のためのガイドライン StdPbc-0312 000 cm−2

000 cm−2

The inductance in this Standard is limited to that of internal traces only and does not contain the portions contributed by the exposed areas such as pins and wires

optical housings) by means of an ARS

The purpose of this Specification is to promote commonality among implementations by defining common representations and conventions of equipment metadata based on SEMI E125 Specification for Equipment Self-Description

SEMI E80-0299 (Reapproved 0710)

S00600 - SEMI S6 - 半導体製造装置の排気換気に関する環境，健康，安全のためのガイドライン StdPbc-0312 000 cm−2NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI SME 8 Referenced SEMI Standards (purchase separately) SEMI F5 Guide for Gaseous Effluent Handling SEMI S2 Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment SEMI S14 Safety Guidelines for Fire Risk